![]() Apparatus and method for determining spectral properties of a surface
专利摘要:
The invention relates to a device (1) for determining, in particular linear or zone-wise, spectral properties of a surface, comprising at least one movably arranged, dispersive element (2) for the spectral decomposition of light (3). According to the invention, it is provided that the at least one dispersive element (2) is deflectably arranged about two axes (4, 5). Furthermore, the invention relates to a use of a device (1) according to the invention. Furthermore, the invention relates to a method for, in particular, linear or area-wise determination of spectral properties of a surface, wherein at least one dispersive element (2) is movably arranged for the spectral decomposition of light (3). 公开号:AT515139A1 申请号:T50804/2013 申请日:2013-12-05 公开日:2015-06-15 发明作者:Andreas Dr Tortschanoff;Andreas Dr Kenda 申请人:Ctr Carinthian Tech Res Ag; IPC主号:
专利说明:
Apparatus and method for determining spectral properties of a surface The invention relates to a device for determining in particular linear or zone-wise spectral properties of a surface, comprising at least one movably arranged, dispersive element for the spectral decomposition of light. Furthermore, the invention relates to a use of a device of the aforementioned type. Furthermore, the invention relates to a method for determining, in particular linear or area-wise, spectral properties of a surface, wherein at least one dispersive element is movably arranged for the spectral decomposition of light. The linear or regional detection of spectral properties of a surface is used inter alia in the separation of waste. A rough separation of z. B. plastic due to its optical properties in the visible spectral range of personnel is relatively easy to carry out. However, if plastic is to be differentiated in more detail (ie the wavelength ranges to be sorted are assumed to be smaller), this is only possible with a suitable device. In the infrared spectral range, which can not be perceived by the human eye, the separation of waste is generally feasible only with a corresponding device. Another area in which a surface is examined for spectral properties is the food industry. Deficiencies in food, such as As molds are only visible to the human eye, if they are already relatively widely spread. However, traces of mold in food should be detected early, which is possible with a suitable device which determines the spectral properties of the surface of food. Devices for determining spectral properties of a surface are known from the prior art. These known devices operate with adjustable wavelength filters to determine the intensity of one or more wavelength components of a surface of a sample to be examined. With such devices it is possible to measure light in a specific spectral range as a function of wavelength. The core of such a device is a wavelength-selecting element, such as a grid or prism, on which the light is incident, whose spectral distribution is to be determined, and which decomposes the incident light into its spectral components or filters out a part thereof, and a corresponding detector for recording one or more spectral components or a spectrum. One type of device uses variable time adjustable wavelength filters. Suitable wavelength filters are continuous or discrete filter wheels, liquid crystal based variable filters, acousto-optically variable filters or electro-optically variable filters. With these adjustable wavelength filters, the spectral information of all pixels of the sample surface are simultaneously reduced to the set wavelength range and can therefore be recorded simultaneously with a flat array of detectors, so-called detector arrays. However, filter wheels have the disadvantage that they are only relatively slow and inflexible when setting different wavelength ranges. If a center wavelength to be detected is to be changed, this takes a long time. Next filter wheels have the disadvantage that they have fixed predetermined filter areas in a finished system. Acousto-optical and electro-optical filters have the disadvantage that the adjustable wavelength range is very limited. This type of filters is z. B in a range of 400 nm to a maximum of 800 nm or from 600 nm to a maximum of 1200 nm adjustable and thus rather inflexible applicable. Furthermore, acousto-optic and electro-optical filters are strongly temperature-dependent, with this temperature dependence influencing the spectral properties of the filters. To reduce this disadvantage, a temperature-stable device is necessary, which, however, brings with it the disadvantage of a complicated and expensive construction. The detector arrays required for detecting spectral properties are manufactured in the visible wavelength range on the basis of silicon and are relatively inexpensive, but only sensitive up to about 1100 nm. In order to detect longer wavelengths than 1100 nm, other detectors, such as. As InGaAs detectors for the near infrared range, are used. However, these detectors are very expensive. Another type of device for determining spectral properties of a surface works with spatial wavelength separation by dispersion with a dispersive element, such. As a grid or prism. In this case, the dispersive element is mounted one-dimensionally deflectable in order to achieve a spectral resolution. Thus, multiple wavelengths for a point of a surface to be examined can be detected by a point detector. The settings of a grid or prism usually take place via a stepping motor. This mechanical control and the movement of such a grating or prism are complicated and expensive and easily susceptible to errors. In order to achieve a spatial resolution in these devices, a relative movement between the sample and the device is carried out. Disadvantageous in the realization with a relative movement, however, are the measurement duration, which is mainly due to the mechanical position adjustment, as well as the limited flexibility for different scenarios. Therefore, systems with detector arrays are usually also realized in this category, with which the spectral information along a line of a surface of a sample can be recorded at one time. Such detector arrays in turn have a relatively high power consumption and are very expensive, especially in the design for the near infrared range, since the InGaAs detectors used there in contrast to silicon detectors are very expensive and have a lower resolution. Furthermore, spectral properties of a surface can be determined interferometrically. A device suitable for this purpose can, for. B. be a Fourier transform spectrometer, with which the entire wavelength range of an incident light can be continuously tuned and recorded. However, a Fourier transform spectrometer has the disadvantages of large spatial dimensions and a long scan speed, which is due to the inertia of heavy components. In principle, only one surface point can ever be measured in an interferometric measurement. As a result, either by tilting in two axes mirror or by a relative movement between the sample and interferometer, the entire sample surface must be scanned step by step, which in turn is very time consuming. Meanwhile, there are already some approaches to drastically reduce the dimensions of a Fourier transform spectrometer using micromechanical devices. However, there is still the disadvantage of many different, sometimes very expensive components. The object of the invention is to provide a device of the type mentioned, with which both spectrally and spatially resolved can be worked and which has a high flexibility, a compact embodiment, a high detection speed and low component costs. A second object of the invention is to provide a method of the type mentioned, with high flexibility in a cost-effective manner, a high detection speed is achieved. The first object is achieved in that in a device of the type mentioned, the at least one dispersive element is arranged deflectable about two axes. An advantage achieved by the invention is to be seen in particular in that only one component for two-dimensional measurements is necessary due to the dispersively arranged by two axes dispersive element. This also results in the advantage that with a compact design of the device, the wavelength or the wavelength range can be changed very quickly and easily. Also, a high flexibility is achieved with respect to an adjustable center wavelength. Expediently, the two axes of the dispersive element are oriented approximately perpendicularly to one another, wherein a rotation takes place about a first axis, and a rotation about a second axis whose plane passes through a plane of the first axis, a spectral resolution of the light takes place. This makes it possible to achieve a spectral resolution and a spatial resolution simultaneously with only one component at a variably adjustable wavelength. The component is mounted movably. Furthermore, it is advantageous if the dispersive element is formed from a micromechanical component, preferably made of silicon. Optimally, this is a micromechanical mirror with applied grid. As a result of the possible very small design of the dispersive element, the device can be designed as a miniature spectrometer. It is favorable in this context if the dispersive element is vibratable and / or quasi-statically deflectable. In principle, the dispersive element can be operated in two different operating states. First, it can be used as a kind of wavelength filter. In this case, the first axis, through which a point to be examined a surface of a sample is adjustable, quasi-statically deflected or resonantly vibrated. The second axis of the dispersive element, by means of which a wavelength can be selected, is retained or a deflection is set quasi-statically, so that the surface of a molded part can be scanned for a specific wavelength, the so-called center wavelength. In this operating mode, the selected center wavelength can be changed quickly and easily. On the other hand, the dispersive element can be designed so that the first axis of the dispersive element can be set in oscillation and thus the surface of the molded part can be scanned in a linear manner. It is envisaged that either one of the two axes or both axes of the dispersive element are set into oscillation. It is advantageous if an oscillation of the dispersive element takes place resonantly, provided that it is oscillating about one of the two axes or about both axes. The frequency of the oscillation corresponds to the resonance frequency of the respective axis. It is advantageous that the speed of the vibrating dispersive element is flexibly adjustable and can be varied quickly, depending on how fast and how precisely a surface is to be investigated. The dispersive element preferably oscillates at a frequency of up to 50 kHz. Overall, there is a high degree of flexibility with regard to the functioning of the dispersive element. It has been proven that optical elements are provided for imaging a geometric region of a sample. As a result, the area to be examined can be focused precisely on a device for detecting the spectrally dispersed light. A further advantage results if a control unit is provided with which deflections of the dispersive element can be controlled. With the control unit, the two axes of the dispersive element are independently controllable, so that a defined deflection of both axes can be specified. Furthermore, it is advantageous if a relative movement between the sample and the dispersive element can be controlled with the control unit. In this way, the sample can also be measured in a spatially resolved manner in a second axis, optimally perpendicular to a first axis of the sample. It is also advantageous if the light can be spectrally decomposed by the dispersive element and a detector is provided with which components of the spectrally dispersed light can be detected. Various adjustable wavelengths or wavelength ranges are then detected by the detector. In the device according to the invention, it is provided that the detector is a stationarily positioned point detector. Thus, a surface of a sample with only one stationary point detector can be detected. A point detector is usually a compact detector which outputs a signal integrated over its active surface without further spatial resolution and is therefore inexpensive compared to detector lines and detector arrays. The costs reduced with the point detector have an effect, in particular, on measurements in the infrared spectral range, since the costs of detector lines and detector arrays are very high, above all in this area. The point detector also provides low component costs for wavelength ranges where silicon detectors can not be used. It is also advantageous if the dispersive element and the detector send signals to the control unit, the control unit evaluates them and further control signals can be influenced by means of a feedback circuit. This can be instantaneously reacted to the movements of the dispersive element or the deflection of the dispersive element at any time, depending on the signals detected by the control unit, redefined. The device according to the invention makes it possible to evaluate detector signals with a signal processing unit provided. Thus, from the successively recorded detector signals images of the surface of the sample can be generated, which are decomposed into the desired spectral ranges. Thus, a detected spectrum is not only electronically evaluable, but also visible visually on a screen or the like. A use of the device according to the invention is typically carried out in a spectroscopic, spatially resolved examination of a geometric sample surface. The second object is achieved in that in a method of the type mentioned above, a geometrical region of a sample is scanned one-dimensionally by positioning the dispersive element about a first axis, wherein the dispersive element incident light is spectrally dissected by this, and by positioning of the dispersive element about a second axis, the direction of the spectrally dispersed light is set one-dimensionally. An advantage of the method according to the invention can be seen, in particular, in the fact that the dispersive element supplies spectral information of a sample surface in a spatially resolved manner by means of the provided deflections along a geometrical line. For this purpose, the rotations preferably take place about two mutually perpendicular axes. A scan is carried out with the dispersive element wavelength-selective and / or sequential, wherein at high detection speed and thus low measurement time spectral components are determined. There are two different operating states. A condition is for examining a sample surface with respect to a particular center wavelength by deflecting the dispersive element about the first axis and locking the quasi-static position of the second axis of the dispersive element. The second state is for fast reading of a complete wavelength range for each surface point. In this case, the second axis of the dispersive element, in which the dispersion takes place, oscillates resonantly and the first axis of the dispersive element is operated quasi-statically or resonantly. The advantage is that the geometric area of the sample is scanned line by line, so that the entire area can be detected line by line, without certain areas are not taken into account. It has been proven that the light striking the dispersive element is spectrally decomposed in a plane passing through the first axis of the dispersive element. This measure ensures that each point of the area to be examined is examined for its spectral properties. It is also advantageous if the spectrally dispersed light is detected by a deflection detector of the dispersive element about the second axis as a stationary point detector. By this measure, the wavelength or the wavelength range which is to be detected by the detector can be selected and varied. The fixed point detector has the advantage that it is cheaper compared to a line detector or to detector arrays, especially in the infrared spectral range, without causing quality losses. It is useful if a spectrally decomposed image of the geometric region of the sample is generated by means of a signal processing unit from detector signals. This displays an image of the scanned area that can be viewed visually. Furthermore, it is advantageous if information about the spectrally decomposed image of the geometric region of the sample is stored by the signal processing unit in a three-dimensional data field. Thus, the first axis of the sample surface and the second axis of the sample surface and the intensity of the pixel dependent on the examined wavelength range can be displayed. Other features, advantages and effects of the invention will become apparent from the illustrated embodiments. In the drawings, to which reference is made, show: 1 shows a device according to the invention for determining spectral components of a surface; Fig. 2, 3 and 4 are schematic representations of a method according to the invention. FIG. 1 shows a device 1 for detecting spectral components of a surface of a sample 7 comprising a movably mounted, dispersive element 2 for the spectral decomposition of light 3. Next are a detector 10, with the spectrally decomposed Light 9 is detectable, and a control unit 8, which is connected to both the detector 10 and the dispersive element 2, and an optional signal processing unit 11 is provided. For clarity, optical components for generating an image, such as one or more lenses, are not shown. The dispersive element 2 is advantageously a micromechanical mirror with applied grating and this is in two axes 4, 5, which are ideally approximately orthogonal to each other, deflected and arranged accordingly. In principle, the two axes 4, 5 pass through the dispersive element 2 itself. However, it is also possible for the dispersive element 2 to be attached to one or more additional movable (eg pivotable) parts, with the two axes 4, 5 not passing through the dispersive element but through the one or more additional parts go through, so that the dispersive element 2 is indirectly deflectable mounted on the additional parts. The dispersive element 2 receives the light 3 emitted by the sample 7 and decomposes the light 3, according to its dispersive properties, into spectral components of the light 9. The light 3 is separated by optical elements, e.g. B. one or more collecting lenses, not shown, aligned so that it hits as possible as a parallel beam on the dispersive element 2. By deflecting the dispersive element 2 about the first axis 4, a geometric region 6 of the sample 7 to be examined can be selected and scanned linearly. The light 3 from the geometric region 6 is decomposed by the dispersive element 2, wherein the spectral decomposition takes place in a plane parallel to a surface of the dispersive element 2 along the first axis 4. The direction of the spectrally dispersed light 9 can be varied by deflecting the dispersive element 2 about the second axis 5 in the plane. Thus, it can be decided by this deflection about the second axis 5, which wavelength range falls to the detector 10 around the desired center wavelength or which part of the spectrally dispersed light 9. The detector 10 is designed as a point detector, the point detector being understood to be a detector 10 which outputs only signal information. Accordingly, a line detector or a detector array which outputs only information is to be regarded as a point detector. The point detector is positioned such that the desired wavelength range detail, usually selected as narrow as possible, falls on this point detector and depending on the deflection of the dispersive element 2 about the second axis 5, a defined wavelength can be set. This process of scanning, decomposing and spectral selection of the light 3 of the sample 7 is called a scan. In addition, the control unit 8 can control a relative movement between the sample 7 and the dispersive element 2 and the detector 10. In this way, the geometric region 6 of the sample 7 can again be linearly scanned and measured along a second, optimally orthogonal axis to the first axis. As mentioned, the dispersive element 2 is embodied as a micromechanical component, advantageously as a micromechanical mirror with a grating applied, preferably consisting of silicon. In order to realize a fast scan, the dispersive element 2 is designed as a particularly resonantly oscillating micromirror, which is operated at a frequency of preferably up to 50 kHz, particularly well suited. Another type of mirror design is given when the dispersive element is quasi-static operable. The control unit 8 generates defined deflections of the dispersive element 2 about the two axes 4, 5. In addition, the control unit 8 can also transmit information to the detector 10 as well as to the signal processing unit 11. Such information may relate to, for example, the readout time and the readout duration. Optionally, information about the deflection of the dispersive element 2 and the position of the sample 7 during relative movement and detector signals from these components can be sent to the control unit 8. This information is evaluated by the control unit 8 and can determine the further signals of the control unit 8 by means of a feedback circuit. In Fig. 1, the optional signal processing unit 11 is shown. This generates from the successively recorded detector signals the decomposed into the desired spectral regions image of the surface of the geometric region 6 of the sample 7. This information is preferably stored in a three-dimensional data array. The first dimension of the first axis corresponds to the surface of the sample 7, the second dimension of the second axis to the surface of the sample 7, and the third dimension represents the intensity of each pixel corresponding to the wavelengths examined. By means of the signal processing unit 11, a detected Wavelength range, ie a spectrum, not only be evaluated electronically, but also be viewed on a screen. Based on Fig. 2, 3 and 4, the concept of a method according to the invention is shown schematically. The light 3 emanating from the sample 7 is incident on the dispersive element 2 rotatably mounted about the first axis 4 and the second axis 5. The dispersive element 2 forms part of the device 1. The dispersive element 2 divides the incident light 3 into the spectrally dispersed one Light 9, which is guided to the detector 10. The different wavelengths or colors of the light 3 and the spectrally dispersed light 9 are shown in the figures by different types of lines. The dispersive element 2 can operate in the following two different operating states: A first type is the scanning of the surface of the sample 7 for a specific wavelength or center wavelength. In this case, the dispersive element 2 is rotated about the first axis 4, as indicated by the arrows in Fig. 3. Starting from FIG. 2, the deflection of the dispersive element 2 is changed in FIG. 3 such that the same wavelength always falls on the detector 10 for the entire surface of a region 6 of the sample 7. The second axis 5 is held or set quasi-static. In the described operating state, the dispersive element 2 or the device 1 functions as a wavelength filter. The second operating state of the dispersive element 2 comprises the rapid readout of an entire wavelength range of the surface of the sample 7 along a line or a region 6. Starting from FIG. 2, the second axis 5 is resonantly vibrated in FIG Point of the surface of the sample 7 all wavelengths successively on the detector 10 and are read from this. The first axis 4 can be operated either quasi-static or resonant. Thus, in the second operating state, each wavelength is linearly detected for each point of the surface of the sample 7. The device according to the invention and the method according to the invention thus offer the following advantages over the prior art: fewer or smaller optical elements; - only one point detector; - more compact design; - variably adjustable dispersive element; - flexibly adjustable center wavelength; - Significant cost reduction compared to an array with line detectors or detector arrays, especially in the infrared spectral range.
权利要求:
Claims (19) [1] 1. Device (1) for the particular linear or area-wise determination of spectral properties of a surface comprising at least one movably arranged, dispersive element (2) for the spectral decomposition of light (3), characterized in that the at least one dispersive element (2) about two axes (4, 5) is arranged deflectable. [2] 2. Device (1) according to claim 1, characterized in that the two axes (4, 5) of the dispersive element (2) are oriented approximately perpendicular to each other, wherein upon rotation about a first axis (4) a spatial resolution takes place, and during a rotation about the second axis (5) whose plane passes through a plane of the first axis (4), a spectral resolution of the light (3) takes place. [3] 3. Device (1) according to claim 2, characterized in that the dispersive element (2) consists of a micromechanical component, preferably made of silicon. [4] 4. Device (1) according to claim 3, characterized in that the dispersive element (2) is displaceable in oscillation and / or quasi-statically deflectable. [5] 5. Device (1) according to claim 4, characterized in that the oscillation of the dispersive element (2) is resonant. [6] 6. Device (1) according to one of claims 1 to 5, characterized in that optical elements for imaging a geometric region (6) of a sample (7) are provided. [7] 7. Device (1) according to one of claims 1 to 6, characterized in that a control unit (8) is provided, with which deflections of the dispersive element (2) are controllable. [8] 8. Device (1) according to claim 7, characterized in that with the control unit (8) a relative movement between the sample (7) and the dispersive element (2) is controllable. [9] 9. Device (1) according to one of claims 1 to 8, characterized in that the light (3) by the dispersive element (2) is spectrally decomposable and a detector (10) is provided, with the components of the spectrally dispersed light ( 9) are detectable. [10] 10. Device (1) according to claim 9, characterized in that the detector (10) is a stationarily positioned point detector. [11] 11. Device (1) according to claim 10, characterized in that the dispersive element (2) and the detector (10) send signals to the control unit (8), the control unit (8) evaluates them and further control signals can be influenced by means of a feedback circuit. [12] 12. Use of a device (1) according to one of claims 1 to 11 for the spectroscopic, spatially resolved examination of a geometric sample surface. [13] 13. A method for the particular linear or area-wise determination of spectral properties of a surface, wherein at least one dispersive element (2) for the spectral decomposition of light (3) is movably arranged, characterized in that a geometric region (6) of a sample (7) Positioning the dispersive element (2) around a first axis (4) is scanned one-dimensionally, wherein on the dispersive element (2) incident light (3) is spectrally decomposed by this, and by positioning the dispersive element (2) about a second axis (5) the direction of the spectrally dispersed light (9) is set one-dimensionally. [14] 14. The method according to claim 13, characterized in that a scan with the dispersive element (2) is carried out wavelength-selective and / or sequential. [15] 15. The method according to claim 13 or 14, characterized in that the geometric region (6) of the sample (7) is scanned line by line. [16] 16. The method according to any one of claims 13 to 15, characterized in that on the dispersive element (2) striking light (3) in a about the first axis (4) of the dispersive element (2) passing through the plane is spectrally decomposed. [17] 17. The method according to any one of claims 13 to 16, characterized in that the spectrally decomposed light (9) depending on the deflection of the dispersive element (2) about the second axis (5) detected by a stationary point detector detector (10) becomes. [18] 18. The method according to claim 17, characterized in that with a signal processing unit (11) from detector signals, a spectrally decomposed image of the geometric region (6) of the sample (7) is generated. [19] 19. The method according to claim 18, characterized in that information about the spectrally decomposed image of the geometric region (6) of the sample (7) from the signal processing unit (11) are stored in a three-dimensional data field.
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同族专利:
公开号 | 公开日 EP2881730B1|2020-07-08| EP2881730A1|2015-06-10| AT515139B1|2015-09-15|
引用文献:
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申请号 | 申请日 | 专利标题 ATA50804/2013A|AT515139B1|2013-12-05|2013-12-05|Apparatus and method for determining spectral properties of a surface|ATA50804/2013A| AT515139B1|2013-12-05|2013-12-05|Apparatus and method for determining spectral properties of a surface| EP14195919.7A| EP2881730B1|2013-12-05|2014-12-02|Device and method for determining spectral properties of a surface| 相关专利
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